| 摘要 |
A micro-machined valve assembly includes a valve diaphragm that will not adhere to a valve seat during elevated temperature operation. The valve assembly has a valve seat, a diaphragm suspended over the valve seat, the diaphragm configured to contact the valve seat upon the application of an actuating pressure on the diaphragm. The diaphragm has a continuous film of a first material, where a portion of the first material in a region where the diaphragm contacts the valve seat includes a first metallic material. The absence of an adhesive or the addition of the metal layer extends the operating temperature of the valve by preventing adhesion of the diaphragm to the valve seat during high temperature operation. Selection of an appropriate material for the metal layer can improve chemical inertness of valve, thereby reducing the possibility that the material flowing through the valve will react with the metal.
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