发明名称 P-type single crystal zinc-oxide having low resistivity and method for preparation thereof
摘要 The present invention provides a low-resistivity p-type single-crystal zinc oxide. An n-type dopant and p-type dopant are doped into zinc oxide with higher concentration of the p-type dopant than that of the n-type dopant during forming a single-crystal of the zinc oxide through a thin film forming process. Further, an element of the second group is co-doped to allow oxygen to be stabilized.
申请公布号 US6896731(B1) 申请公布日期 2005.05.24
申请号 US20020048498 申请日期 2002.04.30
申请人 JAPAN SCIENCE AND TECHNOLOGY CORP. 发明人 YAMAMOTO TETSUYA;YOSHIDA HIROSHI;YAO TAKAFUMI
分类号 H01L21/363;C30B23/02;C30B25/02;C30B29/16;(IPC1-7):C30B23/00;C30B25/00;C01G9/02;B32B9/00 主分类号 H01L21/363
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