METHOD FOR MAKING SEMICONDUCTOR APPARATUS AND WAFER PROCESSING APPARATUS,申请号KR20020002039-传众专利搜索

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发明名称	METHOD FOR MAKING SEMICONDUCTOR APPARATUS AND WAFER PROCESSING APPARATUS
摘要
申请公布号	KR100491128(B1)	申请公布日期	2005.05.24
申请号	KR20020002039	申请日期	2002.01.14
申请人		发明人
分类号	C23C16/42;H01L21/205;C23C16/44;C23C16/455;C30B25/14;(IPC1-7):H01L21/205	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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