Substrate processing apparatus

摘要

A substrate processing apparatus includes a transport robot (TR 1 ) formed with a telescopic vertical movement mechanism of a so-called telescopially nestable multi-tier construction. A drive mechanism (D 1 ) is initially driven to move a support member ( 48 ) upwardly to simultaneously elevate a vertical movement member ( 42 d). As the vertical movement member ( 42 d) rises, a pulley ( 47 c) simultaneously moves upwardly. As the pulley ( 47 c) moves upwardly, a vertical movement member ( 42 c) is lifted upwardly by a belt (L 1 ). Similar actions elevate a pair of transport arms ( 31 a , 31 b) provided on the top of a vertical movement member ( 42 a). The increase in the number of tiers of the nestable multi-tier structure precludes the increase in height of the transport robot (TR 1 ) in its retracted position. The substrate processing apparatus, if having an increased height, is capable of transporting a substrate to and from processing portions and eliminates the need to reassemble and adjust the transport robot (TR 1 ) for transportation of the apparatus.