| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of simply performing a marking work. SOLUTION: The marking device is provided with a supporting member, and an arm member. The supporting member is fixed to the outer periphery of a lens-barrel so as to be movable in the longitudinal axial direction of the lens-barrel of an objective lens. The arm member is fixed to the supporting member so as to be rotatable about the axis in the direction almost orthogonal to the longitudinal axial direction of the lens-barrel of the objective lens, and also has a marker for marking on the part positioned between the objective lens and a sample when rotated. Therefore, the marker can be put in and out of an observation visual field by the rotary motion of the arm member. Then, marking can be carried out while the marker is within the observation visual field by moving the supporting member to the sample side in the longitudinal axial direction of the lens barrel of the objective lens. Therefore, the marking work can be carried out by very simple operation. COPYRIGHT: (C)2005,JPO&NCIPI
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