发明名称 A TAPE-MANUFACTURING SYSTEM HAVING EXTENDED OPERATIONAL CAPABILITIES
摘要 A tape-manufacturing system (10) for coating at least one tape substrate (28) such as, for example, for the manufacture of a high-temperature superconductor (HTS) conductor is disclosed. The tape-manufacturing system includes at least two electron beam (e-beam) deposition sources (12), at least one assist source (14) and, optionally, a controller (16). Each e-beam deposition source may be in-process repairable. Each e-beam deposition source (12) is capable of to communicating an evaporant material with at least a portion of at least one tape substrate (28) to deposit a coating thereon. The at least one assist source (14) is capable of communicating a beam of a species to the coating. The controller (16) communicates with the at least two e-beam deposition sources (12) and the at least one assist source (14).
申请公布号 WO2005045094(A1) 申请公布日期 2005.05.19
申请号 WO2004US36667 申请日期 2004.11.03
申请人 SUPERPOWER, INC.;SELVAMANICKAM, VENKAT 发明人 SELVAMANICKAM, VENKAT
分类号 C23C14/08;C23C14/22;C23C14/30;C23C14/54;C23C14/56;H01L39/24 主分类号 C23C14/08
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