发明名称 |
Multi-beam probe with adjustable beam angle |
摘要 |
Compound surfaces of a test object are interferometrically measured by a multi-beam probe. One of two measuring beams emerges from the probe at a fixed angle for measuring one of the compound surfaces, and the other measuring beam emerges from the probe at a variable angle for measuring a plurality of other compound surfaces.
|
申请公布号 |
US2005107184(A1) |
申请公布日期 |
2005.05.19 |
申请号 |
US20030716368 |
申请日期 |
2003.11.18 |
申请人 |
CORNING TROPEL CORPORATION |
发明人 |
FARMIGA NESTOR O.;FRANKOVICH JACK W. |
分类号 |
A63B53/04;G01B9/02;(IPC1-7):A63B53/04 |
主分类号 |
A63B53/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|