发明名称 |
HEATER CHIP WITH DOPED DIAMOND-LIKE CARBON LAYER AND OVERLYING CAVITATION LAYER |
摘要 |
An inkjet printhead heater chip has a silicon substrate with a heater stack formed of a plurality of thin film layers thereon for ejecting an ink drop during use. The thin film layers include: a thermal barrier layer on the silicon substrate; a resistor layer on the thermal barrier layer; a doped diamond-like carbon layer on the resistor layer; and a cavitation layer on the doped diamond-like carbon layer. The doped diamond-like carbon layer preferably includes silicon but may also include nitrogen, titanium, tantalum, combinations thereof or other. When it includes silicon, a preferred silicon concentration ranges from 20 to 25 atomic percent. A preferred cavitation layer includes an undoped diamond-like carbon, tantalum or titanium layer. The doped diamond-like carbon layer ranges in thickness from 500 to 3000 angstroms. The cavitation layer ranges from 500 to 6000 angstroms. Inkjet printheads and printers are also disclosed.
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申请公布号 |
WO2004060676(B1) |
申请公布日期 |
2005.05.19 |
申请号 |
WO2003US41245 |
申请日期 |
2003.12.24 |
申请人 |
LEXMARK INTERNATIONAL, INC. |
发明人 |
ANDERSON, FRANK, E.;BELL, BYRON, V.;CORNELL, ROBERT;GUAN, YIMIN;PARISH, GEORGE, KEITH |
分类号 |
B41J2/14;(IPC1-7):B41J2/05 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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