| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a working method utilizing a new and improved laser beam by which the condensing point of the laser beam (82) can be positioned easily and quickly to a position in an object (34) to be worked at a prescribed depth (D) from the surface of the object (34). <P>SOLUTION: The interval (SL) between a condensing optical system (78) and the surface of the object (34) to be worked is set based on a set mathematical expression, taking the numerical aperture of the optical system (78) and the refractive index of the object (34) into consideration by using the interval between the optical system (78) and the surface of the object (34), when the laser beam is condensed to the surface of the object (34) as a reference interval (BL). <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
