| 摘要 |
PROBLEM TO BE SOLVED: To provide a wire saw having high utilization efficiency of slurry, having a simple structure, easy in controlling the slurry temperature, lengthening the service lift of a rotary roller, and superior in workability such as cleaning/wire tensioning work. SOLUTION: This wire saw 10 cuts an ingot 13 while supplying the slurry including abrasive grains to a wire 14 traveling between a plurality of rotary rollers 19a and 19b. The wire saw has a slurry transfer roller 33 arranged upstream of a part for cutting the ingot 13 between the rotary rollers 19a and 19b, and a slurry supply means 20 for supplying the slurry 31 to a surface of the slurry transfer roller 33 by a controlled supply quantity. The wire saw 10 is characterized by setting the rotational direction of the slurry transfer roller 33 in the direction opposite to the traveling direction of the wire 14 by supplying the slurry 31 to the wire 14 by rotating the slurry transfer roller 33 while contacting with the wire 14. COPYRIGHT: (C)2005,JPO&NCIPI |
