| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a firing method of a ceramic board capable of preventing the contact of the ceramic board and a setter during firing. <P>SOLUTION: This firing method of a ceramic board 12 comprises a step to put the ceramic board 12, a step to put a plurality of support parts 14 which contract during firing process, a step to put a spacer 16 so as to be located around the ceramic board 12 which has a height before the sintering of lower than the height of the support part 14 before the sintering and a height after the sintering of higher than the height of the ceramic board 12, all on a lower setter 10B, a step to mount a setter 10A which covers the ceramic board 12 and the spacer 16 on the plurality of the support parts 14, and a step to fire the ceramic board 12 located between the setters 10A and 10B. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
