| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic-made micromachined component used for an optical part, a biochip, MEMS, etc., at a low cost. <P>SOLUTION: A ceramic powder with an average particle size of ≤30 nm or a molded product obtained by molding the ceramic powder is pressurized using a mold material at ≤0.60T<SB>m</SB>°C (wherein T<SB>m</SB>is the melting or sublimation point), deformed into a final shape having a micromachined part and sintered. If required, a final finishing processing such as cutting and polishing is conducted. The use of the raw material powder with an average particle size of ≤30 nm enables easy deformation of the molded product, lowers the deformation temperature and yields a good micromachinability. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
