| 摘要 |
PROBLEM TO BE SOLVED: To suppress saturation of gas generated in a baking furnace as to a baking furnace for a plasma display panel passing a plasma display panel through the baking furnace to evaporate an organic solvent on the surface of a substrate for baking a component, its manufacturing method and manufacturing method for the plasma display. SOLUTION: A heating chamber 2 heating the substrate 5 of the plasma display panel to which the vaporized material adheres has a first branch chamber 2-j and a second branch chamber 2-k on a downstream side of the moving direction of a transferring container 22. The temperature of the second branch chamber 2-k is set higher than the temperature of the first branch chamber 2-j. Ventilation air in exhaustion piping 11 flows in one discharge direction in the exhaustion piping 11 to be discharged. With a combination of such a discharge direction, a transfer direction and a temperature gradient, the ventilation air of higher temperature in a downstream side area of the heating chamber 2 is mixed with the ventilation air of lower temperature in an upstream side area of the heating chamber 2 in the exhaustion piping 11, and temperature lowering in a part downstream side of the exhaustion piping 11 in an exhaust direction is effectively suppressed. The suppressing effect of the temperature lowering prevents solid deposition in the exhaustion piping 11, effectively prevents reduction of the flow passage cross section of the exhaustion piping 11, and effectively avoids steam-pressure saturation in it. COPYRIGHT: (C)2005,JPO&NCIPI
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