SUBSTRATE ELEVATOR AND SUBSTRATE ELEVATING SYSTEM

摘要

PROBLEM TO BE SOLVED: To shorten a process time in conveyance between layers. SOLUTION: This substrate elevator comprises a frame; a plurality of carrier plates 40 located inside the frame; a first wire 51 connected to one end part of the carrier plates; a second wire 52 connected to the other end part of the carrier plates; and a driving device for moving the first wire and the second wire up and down. The carrier plates 40 move up and down together following the upward and downward movement of the first wire and second wire. COPYRIGHT: (C)2005,JPO&NCIPI