| 摘要 |
A particle beam apparatus has a cooled anti-contaminator ( 18 ) and/or a cooled specimen holder ( 17 ). A thermal conductor ( 19 ) is provided for providing a connection between the anti-contaminator ( 18 ) and/or the specimen holder ( 17 ), on the one hand, and the cooler ( 21 ) of a cryogen vessel ( 20 ) on the other hand. The thermal conductor ( 19 ) includes a carbon fiber bundle. With the carbon fiber bundle ( 19 ), a high thermal conductivity is ensured between the cooler ( 21 ) and the surfaces ( 17, 18 ) to be cooled. At the same time, thermal expansions are avoided which lead to a displacement of the anti-contaminator ( 18 ) and/or the specimen holder ( 17 ).
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