ELECTROMECHANICAL MICROMIRROR DEVICES AND METHODS OF MANUFACTURING THE SAME

摘要

An electromechanical micromirror device comprises a device substrate with a 1 surface and 2 surface, control circuitry disposed on said 1 surface, and a micromirror disposed on said 2 surface. Arrays of such micromirror devices are also described and may be used as spatial light modulators (SLMs). The arrays may be 1 dimension (linear) or 2 dimensional. Methods of fabricating micromirror devices and arrays of such devices are also disclosed. Such methods generally involve providing a device substrate with a 1 surface and a 2 surface, fabricating control circuitry on the 1 surface, and fabricating micromirror(s) on the 2 surface.