| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To inexpensively provide an integrated circuit-equipped acceleration sensor capable of improving the reliability of an acceleration sensor element, preventing latchup even when an integrated circuit board is used for a restricting plate, and acquiring an acceleration sensor function without lowering yields to foreign matter in the acceleration sensor element. <P>SOLUTION: By providing a structure in which a protrusion is provided for a weight overhang part of a weight part to make the protrusion part come into contact with the integrate circuit board first when the weight is displaced, latchup is prevented. By recessing at least part except the protrusion part in the weight overhang part by the amount of the thickness of a flexible part, output and effects to a noise level due to foreign matter at the weight overhang part are eliminated to enlarge the tolerance of the acceleration sensor element to the occurrence of the foreign matter. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
