发明名称 LIQUID DROPLET JET HEAD MANUFACTURING METHOD, LIQUID DROPLET JET HEAD, AND LIQUID DROPLET JET DEVICE, ELECTROLUMINESCENCE DISPLAY PANEL MANUFACTURING DEVICE, MICRO ARRAY MANUFACTURING DEVICE, AND COLOR FILTER MANUFACTURING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid droplet jet head capable of suppressing variation in ejection characteristics to make them uniform as much as possible and to provide a recorder performing recording by using the liquid droplet jet head, and a device for manufacturing a micro array by ejecting a biological molecule or the like. <P>SOLUTION: This manufacturing method comprises a process of determining a combination of a nozzle plate 3 having a nozzle 12 formed thereon and a cavity plate 1 having formed thereon a diaphragm 4 for vibrating to pressurize a liquid in a channel communicating with the nozzle 12 based on a diameter of a nozzle hole 12A and the thickness of the diaphragm 4, and a process of bonding the determined nozzle plate 3 and the cavity plate 1 with each other by laminating them. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005125681(A) 申请公布日期 2005.05.19
申请号 JP20030365442 申请日期 2003.10.27
申请人 SEIKO EPSON CORP 发明人 YAMAZAKI SEIJI
分类号 B41J2/16;B41J2/045;B41J2/055;G02B5/20;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B41J2/16 主分类号 B41J2/16
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