| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method thereby an error due to residual displacement of diaphragms contained in the electrode-to-electrode gap error of the electrostatic actuator of an ink jet head, can be computed. SOLUTION: The ink jet head 1 has the electrostatic actuator and a dummy actuator. The electrostatic actuator is so constituted that the thin diaphragms 12 formed in a silicon substrate 2 and transparent individual electrodes 22 formed on the bottom of recesses 21 in an electrode glass substrate 3 are opposed to each other. The dummy actuator is so constituted that the rigid body 2a of the silicon substrate and a transparent thin film electrode 32 formed on the bottom of a recess 31, formed simultaneously with the recesses 21, and formed simultaneously with the individual electrodes 22 are opposed to each other. The gap G1 between the diaphragms 12 and the individual electrode 22 and the gap G2 between the rigid body 2a and the thin film electrode 32 are measured utilizing optical interference effect. The difference between the gaps represents the amount of the residual displacement of the diaphragms 12. Therefore, the conditions for laminating and bonding the silicon substrate 2 and the electrode glass substrate 3 can be adjusted so as to suppress or eliminate the residual displacement. COPYRIGHT: (C)2005,JPO&NCIPI
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