FREQUENCY MODULATABLE RESONANT OPTICAL SCANNER

摘要

PROBLEM TO BE SOLVED: To provide a frequency modulatable resonant optical scanner. SOLUTION: The frequency modulatable resonant optical scanner is provided with: a substrate; a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed; a torsion spring supporting the stage from middle portions of both edge sides of the stage; a support portion fixed to the substrate to support the torsion spring; a driving portion rotating the stage with respect to the torsion spring forming a center axis; and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage. COPYRIGHT: (C)2005,JPO&NCIPI