发明名称 |
Apparatus of stocking substrates |
摘要 |
A substrate stocking apparatus is provided, which includes: a plurality of stockers, each stocker including a plurality of shelf plates that includes a plurality of supporting pins supporting the substrate and a plurality of vertical frames fixing and connecting the shelf plates; and an indexer taking a substrate into and out of the stockers.
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申请公布号 |
US2005105992(A1) |
申请公布日期 |
2005.05.19 |
申请号 |
US20040960869 |
申请日期 |
2004.10.07 |
申请人 |
AN GEUN-SOO;YOON GI-CHEON |
发明人 |
AN GEUN-SOO;YOON GI-CHEON |
分类号 |
B65G49/06;B65G1/00;H01L21/673;H01L21/677;(IPC1-7):B65G1/00 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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