| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape profile measuring device capable of realizing highly accurate measurement of a fine short-wavelength pattern by imparting a scatterometer device for solving the problem of grazing incidence in the case of using a reflection type objective lens and the problem of chromatic aberration in the case of using the reflection type objective lens. SOLUTION: In this shape profile measuring device for performing shape profile measurement by collation between a measured spectral waveform and a simulation waveform, vertical incidence can be realized by using one concave mirror 21 and one convex mirror 22 as an image formation system and by using an optical system wherein the image side is on the same side as the object side to the concave mirror 21, namely, by using an Offner type lens as the reflection type objective lens, and since only a vertical reflection component can be detected, the collation between the simulation waveform and the measured waveform becomes possible, to thereby realize highly-accurate short-wavelength measurement. COPYRIGHT: (C)2005,JPO&NCIPI |
