| 摘要 |
When the scribe region 2 is cut off, the dicing detector 53 sends the detection signal A to the changeover circuit 51 and electrically shuts off the pad 50 and the inspection objective circuit 52, and the fixed potential of the input and output passage 54 from the changeover circuit 51 to the inspection objective circuit 52 is monitored by the detector 55. At the same time, the detection objective circuit 52 is changed into a mode, in which a reception of the command of the inspection mode is refused, by the detection signal A. In the case where an abnormality of the fixed potential of the input and output passage 54 is grasped, the inspection objective circuit 52 is changed into the safety mode.
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