发明名称 |
Laser micromachining and methods of same |
摘要 |
The described embodiments relate to laser micromachining a substrate. One exemplary method includes forming a feature into a substrate, at least in part, by directing a laser beam at the substrate. During at least a portion of said forming, the method includes supplying liquid to at least a first region of the feature along a first liquid supply path and supplying liquid to at least a second different region of the feature along at least a second liquid supply path.
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申请公布号 |
US2005103758(A1) |
申请公布日期 |
2005.05.19 |
申请号 |
US20030713298 |
申请日期 |
2003.11.14 |
申请人 |
OTIS CHARLES;KHAVARI MEHRGAN;POLLARD JEFFREY R.;HUTH MARK C. |
发明人 |
OTIS CHARLES;KHAVARI MEHRGAN;POLLARD JEFFREY R.;HUTH MARK C. |
分类号 |
B41J2/135;B23K26/14;B23K26/38;B41J2/455;(IPC1-7):B23K26/14 |
主分类号 |
B41J2/135 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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