| 摘要 |
This publication discloses a method for creating a sensor construction. According to the method, on top of a conducting substrate ( 2 ), an insulating layer ( 5 ) is formed and connected to the micromechanical construction. According to the invention, the insulating layer ( 5 ) is formed to be thicker ( 14 ) in the support area ( 16 ) than in the other areas, or thinner ( 13 ) in the area of the electrode ( 8 ) than in the support area ( 16 ) of the sensor.
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