MICROMIRRORS WITH MECHANISMS FOR ENHANCING COUPLING OF THE MICROMIRRORS WITH ELECTROSTATIC FIELDS

摘要

A micromirror device (122) is disclosed, along with a method of making such a micromirror device (122) that comprises a mirror plate (230), a hinge (214) and an extension plate (212). The extension plate (212) is formed on the mirror plate (230) and between the mirror plate (230) and the electrode (126) associated with the mirror plate (230) for rotating the mirror plate. The.extension plate (212) can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate (212) is formed after the formation of the mirror plate (230). Moreover, also disclosed is a projection system (102) that comprises a spatial light modulator (110) having an array of such micromirrors, as well as a light source (102), condensing optics, wherein light from the light source (102) is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors (110) onto a target, and a controller for selectively actuating the micromirrors (122) in the array (110).