发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of shrinking spaces among patterns and a manufacturing method for the semiconductor device. <P>SOLUTION: The semiconductor device has a first wiring layer 14a with a first lower end 17b, and a first upper end 17a projected from the first lower end 17b; and a second lower end 18b and a second upper end 18a projected from the second lower end section 18b. The second upper end 18a is faced at a first interval X to the first upper end 17a, and the second lower end 18b has the first lower end 17b, and a second wiring layer 14b faced at a second interval Y larger than the first interval X to the first lower end 17b. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005129568(A) 申请公布日期 2005.05.19
申请号 JP20030360727 申请日期 2003.10.21
申请人 TOSHIBA CORP 发明人 KAWASAKI HIROHISA;ISOBE KAZUAKI
分类号 H01L21/28;H01L21/3205;H01L21/768;H01L21/8244;H01L23/52;H01L27/11;H01L29/417;H01L29/76 主分类号 H01L21/28
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