LIGHT RECEIVING/EMITTING DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method where a doping area of a desired depth is controlled and a desired light receiving/emitting device can easily be manufactured.

SOLUTION: The manufacturing method includes (a) a step where an insulation layer 22 is formed on a substrate 21 doped to be n-type or p-type, and a part of the insulation layer 22 is removed so that a predetermined portion of the substrate 21 is exposed; (b) a step where the exposed portion of the substrate 21 is applied with a dopant so that a photoelectric conversion is produced on a pn junction with the substrate 21, and a doping layer 26 doped into a counter polarity to the substrate 21 is formed by heat treatment; and (c) a step where a first electrode 28a and a second electrode 28b are formed on the substrate 21 so that the doping layer 26 is electrically connected. Whereby, The depth of the doping layer 26 having a polarity counter to the substrate 21 can be controlled inside the substrate 21.

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