METHOD AND INSTRUMENT FOR MEASURING THICKNESS OR FACE DENSITY

摘要

PROBLEM TO BE SOLVED: To remove an influence of unevenness generated resulting from a residual stress in a film or the like to realize a highly precise measuring method and instrument, as to measurement of a thickness or face density of the film or a coating layer formed on the film. SOLUTION: Tensile force is impressed along a longitudinal direction of the film 2, and width-directional tension is impressed directly to the film 2 in the vicinity of a measuring point for measuring the thickness or face density of the film 2 or the coating layer 22 formed on the film 2. COPYRIGHT: (C)2005,JPO&NCIPI