Apparatus for and method of series operation of DC microdischarge stages in a tube geometry for microlaser applications

摘要

A method of operation and an apparatus for providing excimer radiation is performed in and comprised of a plurality of microdischarge stages respectively. Each stage is comprised of a cathode element and anode-like element through which elements a selected gas flows. The microdischarge stages of the plurality are serially communicated with each other such that the gas flows in succession through each stage of the plurality. A power supply is coupled to each stage for providing a correspondingly selected plasma voltage to each stage to initiate and/or maintain an excimer plasma within each stage.