| 摘要 |
The invention relates to an accelerometer comprising a moving mass (5) and a fixed part (2), which uses variations in capacitance (3, 4) in order to detect the movement of the mass (5). The inventive accelerometer comprises a first series of electrodes (3, 4) which are solidly connected to the mass (5) and which are interdigitated with a series of electrodes (3, 4) which are solidly connected to the fixed part (2). According to the invention, each moving electrode (4), together with an adjacent fixed electrode (3), forms a capacitance which varies according to the position of the moving mass (5). The accelerometer further comprises an electronic circuit which is used to: (i) detect the variation in at least one capacitance between the moving mass (5) and the fixed part (2), in the form of a moving mass displacement indicator; and also (ii) generate an electrostatic stress in order to return the moving mass (5) to the initial position thereof. Moreover, the aforementioned electronic circuit is provided in order to generate the electrostatic return stress in such a way that it is automatically controlled by a preceding displacement measurement. The invention is characterised in that the recurring return stress thus generated is specifically selected such that the mechanical power frequency spectrum (10, 20) thereof has an essentially zero power zone at the mechanical resonance frequency of the electrodes (4) of the moving mass (5) and/or of the fixed part (2).
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