| 摘要 |
An equipment ( 400 ) for testing semiconductor device performance under high energy pulse conditions, which comprises a high voltage generator ( 401 ) and an on/off switch relay ( 403 ). The relay is resistively connected by a first resistor ( 402 ) to the generator and by a second resistor ( 404 ) to the socket ( 405 a) for the device-under-test ( 406 ); the relay is operable in a partially ionized ambient. A capacitor ( 407 ) is connected to the relay, to the generator, and to the device, and is operable to discharge high energy pulses through the device. A third resistor ( 410 ) is in parallel with the capacitor and the device, and is operable to suppress spurious pulses generated by the relay. This third resistor has a value between about 1 kOmega and 1 MOmega, preferably about 10 kOmega, several orders of magnitude greater than the on-resistance of the device-under-test.
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