Production of glass bodies made from doped quartz glass by flame hydrolysis used in extreme ultraviolet light lithography comprises adding precursors to the fuel to form the doped quartz glass and producing a first blank on a target

摘要

Production of glass bodies made from doped quartz glass by flame hydrolysis comprises adding precursors to the fuel to form the doped quartz glass and producing a first blank (24) on a target (28). Independent claims are also included for the following: (1) process for the production of an extreme ultraviolet light component from the blank; and (2) glass body made from doped quartz glass.