Measuring or testing lateral dimension or volume of recess in layer on substrate surface, or properties of materials in recess, by irradiating and analyzing interaction of radiation with recess

摘要

The method involves applying electromagnetic scanning radiation to the layer with the recess, with a wavelength larger than the lateral dimension of the recess. The response radiation is received and the interaction of the radiation with the layer is used to determine characteristic data for derivation of the dimensions or volume of the recess and the properties of material in the recess. An independent claim is included for a method of manufacturing a component with a recess.