发明名称 DISPENSER
摘要 PROBLEM TO BE SOLVED: To provide a dispenser having a simple structure and capable of suppressing the generation of air bubbles. SOLUTION: In this dispenser equipped with a barrel 1 for storing a liquid agent, a supply valve for controlling the supply of the liquid agent from the barrel 1 to a syringe 3, a leading end valve for controlling the supply of the liquid agent from the syringe 3 to a nozzle 6 and a plunger 7 for pressurizing the liquid agent in the syringe 3 toward the nozzle 6 when the leading end valve is opened, the supply valve and the leading end valve are constituted of pinch valves 13a and 13b for opening and closing a liquid agent flow channel by holding flexible tubes 11 and 17 or releasing the holding of the tubes. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005125186(A) 申请公布日期 2005.05.19
申请号 JP20030361839 申请日期 2003.10.22
申请人 FUJITSU LTD 发明人 NISHIO FUMINOBU;HASEGAWA TAKEYUKI
分类号 B05C5/00;B05C11/10;H01L21/56;(IPC1-7):B05C5/00 主分类号 B05C5/00
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