发明名称 |
LOW TEMPERATURE DEPOSITION OF SILICONE NITRIDE |
摘要 |
A novel class of volatile liquid precursors based on amino substituted disilane compounds is used to form silicon nitride dielectric materials on the surface of substrates. This class of precursors overcomes the issues of high deposition temperatures and the formation of undesirable by-products that are inherent in the present art. In another aspect, methods of depositing silicon nitride films on substrates are provided. |
申请公布号 |
WO2005045899(A2) |
申请公布日期 |
2005.05.19 |
申请号 |
WO2004US36018 |
申请日期 |
2004.10.29 |
申请人 |
AVIZA TECHNOLOGY, INC.;SENZAKI, YOSHIHIDE;HELMS, AUBREY L |
发明人 |
SENZAKI, YOSHIHIDE;HELMS, AUBREY L |
分类号 |
B05D1/22;H01L;H01L21/31;H05H1/24 |
主分类号 |
B05D1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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