| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet ray sensitive laminated article in which a picture formed by the exposure of ultraviolet rays with a short wavelength has sufficient contrast, and to provide the adjusting method of a stepper by the article. SOLUTION: In the laminated article having a layer including an ultraviolet ray sensitive material on a substrate having light reflectivity, the ultraviolet ray sensitive material is used in which absorption maximum (λmax(nm)) occurs in the wavelength region of 480nm to 700nm with ultraviolet ray exposure. The laminated article does not have a minimum value and a maximum value in the wavelength region ofλmax±50(nm) or has only one minimum value in the wavelength region ofλmax±50(nm), and has the maximum value in a region outside the wavelength region in spectral reflection spectrum before ultraviolet ray exposure. COPYRIGHT: (C)2005,JPO&NCIPI
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