| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problems wherein control using control rules, which uses preset control rules, makes it difficult to correct the control rules, and poses degradation in product accuracy when the control rules are changed from an actual process control result. <P>SOLUTION: A control apparatus for providing control using control rules comprises evaluating means for evaluating the control result of the control on the basis of the control rules, automatic control rule regulating means for executing control as changing the control rules to regulate the control rules according to the evaluation result of the evaluating means, and automatic regulation availability determining means for stopping the control rule change by the automatic control rule regulating means if the control result falls below a predetermined value. When the control rules are changed during actual process control, the product accuracy can be kept from lowering to a limit value, so that the control rules can be automatically corrected and optimized during control. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
