| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for making a nano pore for providing an electrical lead wire stretched along a surface of the insulator with a low capacitance and simultaneously providing a relatively wide liquid contacting region with an insulator with a low capacitance. SOLUTION: A apparatus and a method for making a nano pore chip showing a low-capacitance is provided. The apparatus provides a thin diaphragm on a rigid semiconductor frame suitable for making nano pores. The diaphragm has a further thick insulation region associated, for reducing the capacitance. The method for making the apparatus is also disclosed. COPYRIGHT: (C)2005,JPO&NCIPI
|
