摘要 |
PROBLEM TO BE SOLVED: To provide an ammonia gas sensor, with the improved detection accuracy of ammonia gas, in a semiconductor gas sensor that is composed by embedding a coil-like heater made of platinum or a platinum alloy, a conductor-like electrode, or the like in a sensitive gas body formed into a spherical shape. SOLUTION: The heater, made of platinum or a platinum alloy, or the electrode, is set as sensor substrates, and the sensitive gas body 6 is formed spherical in shape so that the sensor substrates are covered. The sensitive gas body 6 is mainly made of tin oxide and contains gold, thus suppressing the disturbance of ammonia detection output by platinum and improving the detection precision of ammonia gas concentration, even though as a result of this, the heater and electrode are formed by platinum or a platinum alloy. COPYRIGHT: (C)2005,JPO&NCIPI
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