| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit many inferior goods due to a common defect from being produced, to enable a defect inspection to be carried out while coping with such a state that the size of an object to be inspected is varied in accordance with products, and to prevent product failure by surely detecting different kinds of defects. <P>SOLUTION: An apparatus is provided with a light source section 1 which has a light source device for irradiating a color sample; an image inputting section 2 which detects and recognizes transmitted light or reflected light from the color sample; and an inspection processing section 3 which compares a recognized image with a reference value and determines whether the defects are present or not. The image inputting section includes cameras 21, 22 which input an image of colored pixels formed on a substrate of the color sample. The inspection processing section 3 includes a host computer 31 which executes respective instructions and controls for the inspection; an image processing devices 33, 34 which are used for processing the image being input from the camera of the image inputting section; and an interface 35 which is used for communicating with other systems. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
