发明名称 STRESSED SEMICONDUCTOR DEVICE STRUCTURES HAVING GRANULAR SEMICONDUCTOR MATERIAL
摘要 A method of fabricating a semiconductor device structure, includes: providing a substrate, providing an electrode on the substrate, forming a recess in the electrode, the recess having an opening, disposing a small grain semiconductor material within the recess, covering the opening to contain the small grain semiconductor material, within the recess, and then annealing the resultant structure.
申请公布号 US2005106799(A1) 申请公布日期 2005.05.19
申请号 US20030707018 申请日期 2003.11.14
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DORIS BRUCE B.;BELYANSKY MICHAEL P.;BOYD DIANE C.;CHIDAMBARRAO DURESETI;GLUSCHENKOV OLEG
分类号 H01L21/8238;(IPC1-7):H01L21/823 主分类号 H01L21/8238
代理机构 代理人
主权项
地址