METHOD FOR PRODUCING HIGH PURITY LIQUID CHLORINE

摘要

[PROBLEMS] To provide a method for producing high purity liquid chlorine scarcely containing hydrogen chloride, water and carbon dioxide, with excellent production efficiency in large quantity. [MEANS FOR SOLVING PROBLEMS] A method for producing high purity liquid chlorine wherein liquid chlorine is distilled under pressure, a gas effluent is cooled in a cooler and separated into a liquefied component and a gaseous material, a part or the whole of said liquefied component is transferred to a product receiving tank as liquid chlorine, characterized in that it comprises providing a by-pass at a midpoint of a piping connecting the liquid outlet of the above cooler and the liquid chlorine tank, taking a part of the above liquefied component into a flow cell for the infrared ray absorbance measurement provided in said by-pass, measuring the contents of impurities in said liquefied component, and transferring the liquefied component having targeted values of impurities to the product receiving tank. The above method allows easy production of a high purity liquid chlorine containing 2 ppm or less of water, 5 ppm or less of hydrogen chloride and 2 ppm or less of carbon dioxide, which high purity chlorine can be suitably used in a semiconductor manufacturing process.