| 摘要 |
An electrostatically actuated MEMS switch 100 has fixed signal path plate 170 attached to a substrate 120 and movable signal path plate 150 attached to a deflecting beam 130 which can be a cantilever or fixed at both ends. To close the signal path, charge applied to actuator plate 160 on substrate 120 attracts plate 140 attached to beam 130, causing deflection of the beam and capacitative coupling via dielectric pad 180 between signal path plates, owing to their increased proximity. A solid state switch connected in parallel with the MEMS switch (fig. 3: 300) is used to open MEMS switch 100. The solid state switch has high power handling capacity but low capacitance so as to not appreciably affect the signal transmission whereas MEMS switch has good signal transmission. To open the switch, the solid state switch is closed; the voltage between plates 140 and 160 is removed allowing the beam to return to its undeflected position; and the solid switch is then turned off. |
