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发明名称
Prüfkopf für Mikrostrukturen mit Schnittstelle
摘要
申请公布号
DE19847244(B4)
申请公布日期
2005.05.19
申请号
DE1998147244
申请日期
1998.10.14
申请人
FEINMETALL GMBH
发明人
SCHMID, RAINER;GIRINGER, KLAUS;GAUS, ULRICH;DEUSCH, HEINZ
分类号
G01R1/073;(IPC1-7):H01R11/18;G01R31/26;G01R31/28
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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