| 摘要 |
PROBLEM TO BE SOLVED: To precisely perform inspection of an electrooptical panel by obtaining both the analog and digital signals from a detection sensor, and providing a sensor signal processor obtaining accurate position information by calculation. SOLUTION: An inspection device making an inspection object of at least one from among a plurality of the electro-optical panels formed on a common mother substrate comprises a light source means for irradiating the electro-optical panel of the inspection object with inspection light, a holding means for holding the mother substrate in a state of spacing a space to a surface part, corresponding to an image display region of the electro-optical panel of the inspection object from among the lower face of the mother substrate on the lower side of the mother substrate, and an imaging means for taking in an image by receiving the light emitted as a display light from the electro-optical panel of the inspection object, in response to incident inspection light. Furthermore, the inspection device is provided with a light-shielding means for blocking a peripheral region, positioned at the circumference of the image display region in the electro-optical panel of the inspection object. COPYRIGHT: (C)2005,JPO&NCIPI
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