Electrode forming method, capacitor element and fabricating method therefor

摘要

An electrode forming method includes the steps of: forming a conductive film on a substrate; forming, on the conductive film, a first mask pattern extending in a first direction; forming a conductive film pattern by etching the conductive film using the first mask pattern; removing the first mask pattern existing on the conductive film pattern; forming, on the substrate and on the conductive film pattern, a second mask pattern extending in a second direction different from the first direction; and forming an electrode by etching the conductive film pattern using the second mask pattern.