发明名称 |
Ultra fine particle film forming method and apparatus |
摘要 |
A ultra fine particle film forming apparatus is provided which is capable of forming a ultra fine particle film which has ultra fine particles sufficiently bonded together, sufficient density, flat surface and uniform density. A planarized ultra fine particle film forming method for forming a planarized ultra fine particle film from a deposited film of ultra fine particles formed by supplying the ultra fine particles to a substrate, the method comprising one or more of a planarizing step of planarizing a surface of the deposited film of the ultra fine particles supplied to the substrate. |
申请公布号 |
US2005107003(A1) |
申请公布日期 |
2005.05.19 |
申请号 |
US20040968746 |
申请日期 |
2004.10.19 |
申请人 |
SECRETARY OF AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY |
发明人 |
AKEDO JUN |
分类号 |
B24B37/04;B24B57/04;B24C1/00;B24C1/10;B24C5/04;C23C4/18;C23C24/00;C23C24/04;H01L41/24;H05K3/10;H05K3/14;(IPC1-7):B24B49/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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