METHOD AND DEVICE FOR SCRIBING FRAGILE MATERIAL SUBSTRATE

摘要

A method for scribing a fragile material substrate by forming a plurality of scribe lines on the surface of the fragile material substrate in directions crossing each other, comprising the steps of forming at least one scribe line in a first direction by a scribe means for generating a highly penetrating vertical crack in the fragile material substrate by applying a point impact onto the surface of the fragile material substrate at a short frequency and forming at least one scribe line in a second direction in a direction crossing at least one scribe line in the first direction by the scribe means without producing an intersection with the scribe line formed in the first direction.