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发明名称
摘要
申请公布号	JP3648805(B2)	申请公布日期	2005.05.18
申请号	JP19950267379	申请日期	1995.10.16
申请人		发明人
分类号	C23C16/48;H01L21/205;H01L21/316;(IPC1-7):C23C16/48	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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